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Articles
SU8 etch mask for patterning PDMS and its application to flexible fluidic microactuators
Publication:
SU8 etch mask for patterning PDMS and its application to flexible fluidic microactuators
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Date
2016
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35332.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Gorissen, Benjamin
;
Van Hoof, Chris
;
Reynaerts, Dominiek
;
De Volder, Michael
Journal
Microsystems & Nanoengineering
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1931
since deposited on 2021-10-23
Acq. date: 2025-12-10
Citations
Metrics
Views
1931
since deposited on 2021-10-23
Acq. date: 2025-12-10
Citations