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SU8 etch mask for patterning PDMS and its application to flexible fluidic microactuators
Publication:
SU8 etch mask for patterning PDMS and its application to flexible fluidic microactuators
Date
2016
Journal article
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35332.pdf
1.55 MB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Gorissen, Benjamin
;
Van Hoof, Chris
;
Reynaerts, Dominiek
;
De Volder, Michael
Journal
Microsystems & Nanoengineering
Abstract
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1929
since deposited on 2021-10-23
Acq. date: 2025-10-24
Citations
Metrics
Views
1929
since deposited on 2021-10-23
Acq. date: 2025-10-24
Citations