SU8 etch mask for patterning PDMS and its application to flexible fluidic microactuators

dc.contributor.author	Gorissen, Benjamin
dc.contributor.author	Van Hoof, Chris
dc.contributor.author	Reynaerts, Dominiek
dc.contributor.author	De Volder, Michael
dc.contributor.imecauthor	Van Hoof, Chris
dc.date.accessioned	2021-10-23T10:59:11Z
dc.date.available	2021-10-23T10:59:11Z
dc.date.embargo	9999-12-31
dc.date.issued	2016
dc.identifier.issn	2055-7434
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/26658
dc.identifier.url	http://www.nature.com/articles/micronano201645
dc.source.beginpage	16045
dc.source.journal	Microsystems & Nanoengineering
dc.source.volume	2
dc.title	SU8 etch mask for patterning PDMS and its application to flexible fluidic microactuators
dc.type	Journal article
dspace.entity.type	Publication
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