Publication:

Integration of Ruthenium-based Wordline in a 3-D NAND Memory Devices

Date

2020
Proceedings Paper
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Author(s)

Breuil, Laurent  
;
El Hajjam, Gabriel
;
Ramesh, Siva  
;
Ajaykumar, Arjun  
;
Arreghini, Antonio  
;
Zhang, Liping  
;
Sebaai, Farid  
;
Nyns, Laura  
;
Raymaekers, Tom  
;
Rosmeulen, Maarten  
;
Van den Bosch, Geert  
;
Furnemont, Arnaud  

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Abstract

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