Publication:
GaN growth on patterned silicon substrates. A thermo mechanical study on wafer bow reduction
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1928 since deposited on 2021-10-20
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Acq. date: 2026-02-24
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Statistics
Views
1928 since deposited on 2021-10-20
1last month
1last week
Acq. date: 2026-02-24
Citations