Publication:
GaN growth on patterned silicon substrates. A thermo mechanical study on wafer bow reduction
Date
| dc.contributor.author | Gonzalez, Mario | |
| dc.contributor.author | Cheng, Kai | |
| dc.contributor.author | Tseng, Peter | |
| dc.contributor.author | Borghs, Gustaaf | |
| dc.contributor.imecauthor | Gonzalez, Mario | |
| dc.contributor.imecauthor | Borghs, Gustaaf | |
| dc.date.accessioned | 2021-10-20T11:15:11Z | |
| dc.date.available | 2021-10-20T11:15:11Z | |
| dc.date.issued | 2012 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20734 | |
| dc.source.conference | 13th Int. Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics - EuroSimE | |
| dc.source.conferencedate | 15/04/2012 | |
| dc.source.conferencelocation | Lisboa Portugal | |
| dc.title | GaN growth on patterned silicon substrates. A thermo mechanical study on wafer bow reduction | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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