Publication:

BEOL compatible WS2 transistors fully fabricated in a 300 mm pilot line

Date

2017
Proceedings Paper
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Author(s)

Schram, Tom  
;
Smets, Quentin  
;
Heyne, Markus
;
Groven, Benjamin  
;
Kunnen, Eddy
;
Thiam, Arame  
;
Devriendt, Katia  
;
Delabie, Annelies  
;
Lin, Dennis  
;
Chiappe, Daniele
;
Asselberghs, Inge  
;
Lux, Marcel  
;
Brus, Stephan  
;
Huyghebaert, Cedric  
;
Sayan, Safak
;
Juncker, Aurélie
;
Caymax, Matty  
;
Radu, Iuliana  

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