Publication:

Extremely low force debonding of thinned CMOS substrate by laser release of a temporary bond material

Date

2016

Proceedings Paper

Simple item page Full metadata Statistics

Files

32826.pdf 2.66 MB

Author(s)

Phommahaxay, Alain

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Potoms, Goedele

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Verbinnen, Greet

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Guerrero, Alice

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Statistics

1953 since deposited on 2021-10-23

4last month

Acq. date: 2026-02-27