Publication:
Impact of SEM accuracy on the CD control during gate patterning process of 0.25μm and sub-0.25μm generations
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1890 since deposited on 2021-09-30
3last month
Acq. date: 2026-01-11
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Metrics
Views
1890 since deposited on 2021-09-30
3last month
Acq. date: 2026-01-11
Citations