Publication:

Ion-implantation-based low-cost Hk/MG process for CMOS low-power application

Date

2010

Proceedings Paper

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Files

20251.pdf 1022.33 KB

Author(s)

Ortolland, Claude

;

;

Srividya, Vidya

;

Degraeve, Robin

;

;

;

Gilbert, Matthieu

;

Kauerauf, Thomas

;

;

;

;

Togo, Mitsuhiro

;

Horiguchi, Naoto

;

Groeseneken, Guido

;

Biesemans, Serge

;

Absil, Philippe

;

Vandervorst, Wilfried

;

;

Hoffmann, Thomas Y.

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1993 since deposited on 2021-10-18

Acq. date: 2026-09-11