Publication:

Resist line edge roughness mitigation for high-NA EUVL

Date

2022

Proceedings Paper

https://doi.org/10.1117/12.2605822

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Author(s)

Ohtomi, Eisuke

;

Philipsen, Vicky

;

;

Welling, Ulrich

;

Tanaka, Yusuke

;

De Simone, Danilo

Journal

Proceedings of SPIE

Statistics

1447 since deposited on 2022-09-08

Acq. date: 2026-04-05