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Direct measurement of Leff and channel profile in MOSFETs using 2-D carrier profiling techniques
Publication:
Direct measurement of Leff and channel profile in MOSFETs using 2-D carrier profiling techniques
Date
1998
Proceedings Paper
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2635.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
De Wolf, Peter
;
Stephenson, Robert
;
Biesemans, Serge
;
Jansen, Philippe
;
Badenes, Gonçal
;
De Meyer, Kristin
;
Vandervorst, Wilfried
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1978
since deposited on 2021-09-30
Acq. date: 2025-10-23
Citations
Metrics
Views
1978
since deposited on 2021-09-30
Acq. date: 2025-10-23
Citations