Silicon photonic MEMS: Exploiting mechanics at the nanoscale to enhance photonic integrated circuits

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Author(s)

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Takabayashi, Alain Y.

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Edinger, Pierre

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Errando-Herranz, Carlos

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Gylfason, Kristinn

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Jezzini, Moises

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Hwang, How Yuan

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Porcel, Marco A.G.

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Lerma Arce, Christina

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Kumar, Saurav

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Abasahl, Banafsheh

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Verheyen, Peter

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1931 since deposited on 2021-10-27

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Acq. date: 2025-10-25