Publication:

Silicon photonic MEMS: Exploiting mechanics at the nanoscale to enhance photonic integrated circuits

Date

2019
Proceedings Paper
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dc.contributor.authorQuack, Niels
dc.contributor.authorSattari, Hamed
dc.contributor.authorTakabayashi, Alain Y.
dc.contributor.authorZhang, Yu
dc.contributor.authorEdinger, Pierre
dc.contributor.authorErrando-Herranz, Carlos
dc.contributor.authorGylfason, Kristinn
dc.contributor.authorWang, xiaojing
dc.contributor.authorNiklaus, Frank
dc.contributor.authorJezzini, Moises
dc.contributor.authorHwang, How Yuan
dc.contributor.authorO'Brien, Peter
dc.contributor.authorPorcel, Marco A.G.
dc.contributor.authorLerma Arce, Christina
dc.contributor.authorKumar, Saurav
dc.contributor.authorAbasahl, Banafsheh
dc.contributor.authorVerheyen, Peter
dc.contributor.authorBogaerts, Wim
dc.contributor.imecauthorKumar, Saurav
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.date.accessioned2021-10-27T16:31:38Z
dc.date.available2021-10-27T16:31:38Z
dc.date.embargo9999-12-31
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33840
dc.identifier.urlhttps://ieeexplore.ieee.org/document/8696652
dc.source.beginpageM2D.3
dc.source.conferenceOptical Fiber Communications Conference and Exhibition (OFC 2019)
dc.source.conferencedate3/03/2019
dc.source.conferencelocationSan Diego, CA USA
dc.title

Silicon photonic MEMS: Exploiting mechanics at the nanoscale to enhance photonic integrated circuits

dc.typeProceedings paper
dspace.entity.typePublication
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