Publication:
Silicon-germanium (SiGe) technology for MEMS and NEMS fabrication
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1835 since deposited on 2021-10-20
2last month
1last week
Acq. date: 2025-12-15
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Views
1835 since deposited on 2021-10-20
2last month
1last week
Acq. date: 2025-12-15
Citations