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Actual 3D analysis of hybrid arrays with in-situ SPM in a combined TOF-SIMS/SPM tool
Publication:
Actual 3D analysis of hybrid arrays with in-situ SPM in a combined TOF-SIMS/SPM tool
Date
2018
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Spampinato, Valentina
;
Dialameh, Masoud
;
Fleischmann, Claudia
;
Franquet, Alexis
;
Vandervorst, Wilfried
;
van der Heide, Paul
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1999
since deposited on 2021-10-26
Acq. date: 2025-10-26
Citations
Metrics
Views
1999
since deposited on 2021-10-26
Acq. date: 2025-10-26
Citations