Publication:

Actual 3D analysis of hybrid arrays with in-situ SPM in a combined TOF-SIMS/SPM tool

Date

2018
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Spampinato, Valentina  
;
Dialameh, Masoud  
;
Fleischmann, Claudia  
;
Franquet, Alexis  
;
Vandervorst, Wilfried  
;
van der Heide, Paul  

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2005 since deposited on 2021-10-26
Acq. date: 2026-04-25

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2005 since deposited on 2021-10-26
Acq. date: 2026-04-25

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