Publication:

Actual 3D analysis of hybrid arrays with in-situ SPM in a combined TOF-SIMS/SPM tool

Date

2018
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dc.contributor.authorSpampinato, Valentina
dc.contributor.authorDialameh, Masoud
dc.contributor.authorFleischmann, Claudia
dc.contributor.authorFranquet, Alexis
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorvan der Heide, Paul
dc.contributor.imecauthorSpampinato, Valentina
dc.contributor.imecauthorDialameh, Masoud
dc.contributor.imecauthorFleischmann, Claudia
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorvan der Heide, Paul
dc.contributor.orcidimecSpampinato, Valentina::0000-0003-3225-6740
dc.contributor.orcidimecDialameh, Masoud::0000-0002-1439-590X
dc.contributor.orcidimecFleischmann, Claudia::0000-0003-1531-6916
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecvan der Heide, Paul::0000-0001-6292-0329
dc.date.accessioned2021-10-26T04:28:32Z
dc.date.available2021-10-26T04:28:32Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/31836
dc.source.conferenceSIMS Europe 2018
dc.source.conferencedate17/09/2018
dc.source.conferencelocationMünster Germany
dc.title

Actual 3D analysis of hybrid arrays with in-situ SPM in a combined TOF-SIMS/SPM tool

dc.typeOral presentation
dspace.entity.typePublication
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