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Growth mechanisms for Si epitaxy on O atomic layers: impact of O-content and surface structure
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Growth mechanisms for Si epitaxy on O atomic layers: impact of O-content and surface structure
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Date
2016
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Jayachandran, Suseendran
;
Billen, Arne
;
Douhard, Bastien
;
Conard, Thierry
;
Meersschaut, Johan
;
Moussa, Alain
;
Caymax, Matty
;
Bender, Hugo
;
Vandervorst, Wilfried
;
Heyns, Marc
;
Delabie, Annelies
Journal
Applied Surface Science
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1926
since deposited on 2021-10-23
Acq. date: 2025-12-10
Citations
Metrics
Views
1926
since deposited on 2021-10-23
Acq. date: 2025-12-10
Citations