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Growth mechanisms for Si epitaxy on O atomic layers: impact of O-content and surface structure

Date

2016
Journal article
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dc.contributor.authorJayachandran, Suseendran
dc.contributor.authorBillen, Arne
dc.contributor.authorDouhard, Bastien
dc.contributor.authorConard, Thierry
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorMoussa, Alain
dc.contributor.authorCaymax, Matty
dc.contributor.authorBender, Hugo
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorHeyns, Marc
dc.contributor.authorDelabie, Annelies
dc.contributor.imecauthorJayachandran, Suseendran
dc.contributor.imecauthorDouhard, Bastien
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.date.accessioned2021-10-23T11:32:46Z
dc.date.available2021-10-23T11:32:46Z
dc.date.issued2016
dc.identifier.issn0169-4332
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26782
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0169433216309205
dc.source.beginpage152
dc.source.endpage160
dc.source.journalApplied Surface Science
dc.source.volume384
dc.title

Growth mechanisms for Si epitaxy on O atomic layers: impact of O-content and surface structure

dc.typeJournal article
dspace.entity.typePublication
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