Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Articles
Growth and characterization of atomic layer deposited WC0.7N0.3 on polymer films
Publication:
Growth and characterization of atomic layer deposited WC0.7N0.3 on polymer films
Date
2004
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Martin Hoyas, Ana
;
Schuhmacher, Jorg
;
Shamiryan, Denis
;
Waeterloos, Joost
;
Besling, W.
;
Celis, Jean-Pierre
;
Maex, Karen
Journal
Journal of Applied Physics
Abstract
Description
Metrics
Views
1931
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations
Metrics
Views
1931
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations