Publication:
Growth and characterization of atomic layer deposited WC0.7N0.3 on polymer films
Date
| dc.contributor.author | Martin Hoyas, Ana | |
| dc.contributor.author | Schuhmacher, Jorg | |
| dc.contributor.author | Shamiryan, Denis | |
| dc.contributor.author | Waeterloos, Joost | |
| dc.contributor.author | Besling, W. | |
| dc.contributor.author | Celis, Jean-Pierre | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-10-15T14:45:40Z | |
| dc.date.available | 2021-10-15T14:45:40Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9273 | |
| dc.source.beginpage | 381 | |
| dc.source.endpage | 388 | |
| dc.source.issue | 1 | |
| dc.source.journal | Journal of Applied Physics | |
| dc.source.volume | 95 | |
| dc.title | Growth and characterization of atomic layer deposited WC0.7N0.3 on polymer films | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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