Publication:
300mm wafer thinning and backside passivation compatibility with temporary wafer bonding for 3D stacked IC applications
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2112 since deposited on 2021-10-18
3last month
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Acq. date: 2026-02-25
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Statistics
Views
2112 since deposited on 2021-10-18
3last month
2last week
Acq. date: 2026-02-25
Citations