Publication:
Metal induced crystallization of SiGe at 370 °C for monolithically integrated MEMS applications
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1833 since deposited on 2021-10-15
1last month
Acq. date: 2025-12-10
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Views
1833 since deposited on 2021-10-15
1last month
Acq. date: 2025-12-10
Citations