Publication:
Metal induced crystallization of SiGe at 370 °C for monolithically integrated MEMS applications
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1831 since deposited on 2021-10-15
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Acq. date: 2025-10-25
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Views
1831 since deposited on 2021-10-15
402item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations