Publication:
Metal induced crystallization of SiGe at 370 °C for monolithically integrated MEMS applications
Date
| dc.contributor.author | Sedky, Sherif | |
| dc.contributor.author | Baert, Kris | |
| dc.contributor.author | Van Hoof, Chris | |
| dc.contributor.author | Wang, Yi | |
| dc.contributor.author | Van der Biest, Omer | |
| dc.contributor.author | Witvrouw, Ann | |
| dc.contributor.imecauthor | Van Hoof, Chris | |
| dc.contributor.orcidimec | Van Hoof, Chris::0000-0002-4645-3326 | |
| dc.date.accessioned | 2021-10-15T16:09:04Z | |
| dc.date.available | 2021-10-15T16:09:04Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9578 | |
| dc.source.beginpage | 333 | |
| dc.source.conference | Amorphous and Nanocrystalline Silicon Science and Technology | |
| dc.source.conferencedate | 12/04/2004 | |
| dc.source.conferencelocation | San Francisco, CA USA | |
| dc.source.endpage | 338 | |
| dc.title | Metal induced crystallization of SiGe at 370 °C for monolithically integrated MEMS applications | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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