Publication:

Atomic layer deposition of Al2O3 on S-passivated Ge

Date

2011

Journal article

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Files

23247.pdf 602.21 KB

Author(s)

;

Ceuppens, Joris

;

;

;

Delabie, Annelies

;

Struyf, Herbert

;

De Gendt, Stefan

;

Muller, Matthias

;

Beckhoff, Burkhard

;

Journal

Microelectronic Engineering

Statistics

1989 since deposited on 2021-10-19

Acq. date: 2026-04-26