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Study of the influence of the nonequilibrium point defect concentration gradient on the dopant flux during ion implantation in silicon at high temperatures
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Study of the influence of the nonequilibrium point defect concentration gradient on the dopant flux during ion implantation in silicon at high temperatures
Date
1995
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Kol'dyaev, Victor
Journal
Nuclear Instruments and Methods in Physics Research B
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1985
since deposited on 2021-09-29
Acq. date: 2025-10-23
Citations
Metrics
Views
1985
since deposited on 2021-09-29
Acq. date: 2025-10-23
Citations