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Study of the influence of the nonequilibrium point defect concentration gradient on the dopant flux during ion implantation in silicon at high temperatures

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1990 since deposited on 2021-09-29
1last month
Acq. date: 2026-05-01

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1990 since deposited on 2021-09-29
1last month
Acq. date: 2026-05-01

Citations