Publication:

Metal gate technology using a Dy2O3 dielectric cap approach for multiple-VT in NMOS FinFETs

Date

2007

Proceedings Paper

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Author(s)

Ferain, Isabelle

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;

Witters, Liesbeth

;

Collaert, Nadine

;

;

;

Kauerauf, Thomas

;

Adelmann, Christoph

;

Richard, Olivier

;

;

;

;

Van Elshocht, Sven

;

;

San Tamer, Kemal

;

De Meyer, Kristin

;

Biesemans, Serge

;

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Acq. date: 2026-01-25