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First demonstration of 3D stacked Finfets at a 45nm fin pitch and 110nm gate pitch technology on 300mm wafers
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1 since deposited on 2021-10-26
Acq. date: 2026-01-12
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1977 since deposited on 2021-10-26
Acq. date: 2026-01-12
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Downloads
1 since deposited on 2021-10-26
Acq. date: 2026-01-12
Views
1977 since deposited on 2021-10-26
Acq. date: 2026-01-12
Citations