Publication:
First demonstration of 3D stacked Finfets at a 45nm fin pitch and 110nm gate pitch technology on 300mm wafers
Date
Loading...
Files
Journal
Abstract
Description
Statistics
Downloads
1 since deposited on 2021-10-26
Acq. date: 2026-05-18
Views
1979 since deposited on 2021-10-26
Acq. date: 2026-05-18
Citations
Statistics
Downloads
1 since deposited on 2021-10-26
Acq. date: 2026-05-18
Views
1979 since deposited on 2021-10-26
Acq. date: 2026-05-18
Citations