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First demonstration of 3D stacked Finfets at a 45nm fin pitch and 110nm gate pitch technology on 300mm wafers
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Acq. date: 2026-02-24
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Acq. date: 2026-02-24
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1 since deposited on 2021-10-26
Acq. date: 2026-02-24
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1978 since deposited on 2021-10-26
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Acq. date: 2026-02-24
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