Publication:

Simple current and capacitance methods for bulk FinFET height extraction

Date

2011-03

Proceedings Paper

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Files

21403.pdf 670.05 KB

Author(s)

Chiarella, Thomas

;

Parvais, Bertrand

;

Horiguchi, Naoto

;

Togo, Mitsuhiro

;

Kerner, Christoph

;

Witters, Liesbeth

;

Absil, Philippe

;

Biesemans, Serge

;

Hoffmann, Thomas Y.

Metrics

1794 since deposited on 2021-10-19

Acq. date: 2025-12-16