Publication:

Growth and characterization of single and mixed metal oxides by ALCVD on various surfaces for high-k gate stack applications

Date

2002

Presentation

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Author(s)

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Carter, Richard

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Conard, Thierry

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De Gendt, Stefan

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Delabie, Annelies

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Richard, Olivier

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Vandervorst, Wilfried

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Cosnier, Vincent

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Statistics

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Acq. date: 2026-01-25