Publication:

Growth and characterization of single and mixed metal oxides by ALCVD on various surfaces for high-k gate stack applications

Date

Loading...
Thumbnail Image

Abstract

Description

Metrics

Views

2048 since deposited on 2021-10-14
Acq. date: 2025-12-08

Citations

Metrics

Views

2048 since deposited on 2021-10-14
Acq. date: 2025-12-08

Citations