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Scaled-down c-Si and c-SiGe wagon-wheels for the visualization of the anisotropy and selectivity of wet-chemical etchants

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1898 since deposited on 2021-10-27
2last month
Acq. date: 2026-08-11

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Views

1898 since deposited on 2021-10-27
2last month
Acq. date: 2026-08-11

Citations