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Scaled-down c-Si and c-SiGe wagon-wheels for the visualization of the anisotropy and selectivity of wet-chemical etchants

Date

2019
Journal article
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dc.contributor.authorPacco, Antoine
dc.contributor.authorTao, Zheng
dc.contributor.authorRip, Jens
dc.contributor.authorvan Dorp, Dennis
dc.contributor.authorPhilipsen, Harold
dc.contributor.authorHolsteyns, Frank
dc.contributor.imecauthorPacco, Antoine
dc.contributor.imecauthorTao, Zheng
dc.contributor.imecauthorRip, Jens
dc.contributor.imecauthorvan Dorp, Dennis
dc.contributor.imecauthorPhilipsen, Harold
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.orcidimecvan Dorp, Dennis::0000-0002-1085-4232
dc.contributor.orcidimecPhilipsen, Harold::0000-0002-5029-1104
dc.date.accessioned2021-10-27T15:16:32Z
dc.date.available2021-10-27T15:16:32Z
dc.date.embargo9999-12-31
dc.date.issued2019
dc.identifier.issn1556-276X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33719
dc.identifier.urlhttps://doi.org/10.1186/s11671-019-3114-8
dc.source.beginpage285
dc.source.journalNanoscale Research Letters
dc.source.volume14
dc.title

Scaled-down c-Si and c-SiGe wagon-wheels for the visualization of the anisotropy and selectivity of wet-chemical etchants

dc.typeJournal article
dspace.entity.typePublication
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