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Measurement and simulation of boron diffusivity in strained Si1-xGex epitaxial layers

Date

2000
Proceedings Paper
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dc.contributor.authorKrishnasamy, Rajendran
dc.contributor.authorSchoenmaker, Wim
dc.date.accessioned2021-10-14T13:37:46Z
dc.date.available2021-10-14T13:37:46Z
dc.date.embargo9999-12-31
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4685
dc.source.beginpage108
dc.source.conferenceProceedings of the 7th International Workshop on Computational Electronics - IWCE
dc.source.conferencedate22/05/2000
dc.source.conferencelocationGlasgow UK
dc.source.endpage109
dc.title

Measurement and simulation of boron diffusivity in strained Si1-xGex epitaxial layers

dc.typeProceedings paper
dspace.entity.typePublication
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