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Articles
Attenuated phase shift masks: an interview with Andreas Erdmann
Publication:
Attenuated phase shift masks: an interview with Andreas Erdmann
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Date
2022-12-28
Editorial Material
https://doi.org/10.1117/1.JMM.21.4.040402
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326.2 MB
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Gallagher, Emily
Journal
JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3
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3
since deposited on 2023-03-01
Acq. date: 2025-12-15
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1339
since deposited on 2023-03-01
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last month
Acq. date: 2025-12-15
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Metrics
Downloads
3
since deposited on 2023-03-01
Acq. date: 2025-12-15
Views
1339
since deposited on 2023-03-01
1
last month
Acq. date: 2025-12-15
Citations