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New properties of halogen plasma-treated Cu films
Publication:
New properties of halogen plasma-treated Cu films
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Date
2009
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Pikulev, V.
;
Dictus, Dries
;
Loginova, S.
;
Baklanov, Mikhaïl
Journal
International Journal of Materials Research
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1904
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Acq. date: 2025-12-15
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Metrics
Views
1904
since deposited on 2021-10-18
1
last month
Acq. date: 2025-12-15
Citations