Publication:
New properties of halogen plasma-treated Cu films
Date
| dc.contributor.author | Pikulev, V. | |
| dc.contributor.author | Dictus, Dries | |
| dc.contributor.author | Loginova, S. | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.imecauthor | Dictus, Dries | |
| dc.contributor.orcidimec | Dictus, Dries::0000-0002-7896-1747 | |
| dc.date.accessioned | 2021-10-18T01:45:04Z | |
| dc.date.available | 2021-10-18T01:45:04Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2009 | |
| dc.identifier.issn | 1862-5282 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/16025 | |
| dc.source.beginpage | 826 | |
| dc.source.endpage | 829 | |
| dc.source.issue | 6 | |
| dc.source.journal | International Journal of Materials Research | |
| dc.source.volume | 100 | |
| dc.title | New properties of halogen plasma-treated Cu films | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |