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Particle-induced X-ray emission in the analysis of GeCu thin films and photoresists containing As impurities
Publication:
Particle-induced X-ray emission in the analysis of GeCu thin films and photoresists containing As impurities
Date
2014
Meeting abstract
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29208.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Kayhko, Marko
;
Meersschaut, Johan
;
Sajavaara, Timo
Journal
Abstract
Description
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1886
since deposited on 2021-10-22
Acq. date: 2025-10-23
Citations
Metrics
Views
1886
since deposited on 2021-10-22
Acq. date: 2025-10-23
Citations