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Particle-induced X-ray emission in the analysis of GeCu thin films and photoresists containing As impurities

Date

2014
Meeting abstract
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dc.contributor.authorKayhko, Marko
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorSajavaara, Timo
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.date.accessioned2021-10-22T02:31:13Z
dc.date.available2021-10-22T02:31:13Z
dc.date.embargo9999-12-31
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24040
dc.identifier.urlhttp://webhotel2.tut.fi/fys/physicsdays/program/
dc.source.conferencePhysics Days. The 48th Annual Meeting of the Finnish Physical Society
dc.source.conferencedate11/03/2014
dc.source.conferencelocationTampere Finland
dc.title

Particle-induced X-ray emission in the analysis of GeCu thin films and photoresists containing As impurities

dc.typeMeeting abstract
dspace.entity.typePublication
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