Publication:

Scatterometry Application on Cu/SiCN surface topography towards high volume manufacturing

Date

2024

Proceedings Paper

https://doi.org/10.1109/ESTC60143.2024.10712071

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Author(s)

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Charley, Anne-Laure

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Leray, Philippe

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Journal

N/A

Metrics

247 since deposited on 2025-02-15

Acq. date: 2026-01-08