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H2O2 decomposition and its impact on silicon surface roughening and gate oxide integrity
Publication:
H2O2 decomposition and its impact on silicon surface roughening and gate oxide integrity
Date
1995
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Schmidt, Harald
;
Meuris, Marc
;
Rotondaro, Antonio
;
Heyns, Marc
;
Hurd, Trace
;
Hatcher, Z.
Journal
Japanese Journal of Applied Physics. Part 1
Abstract
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2200
since deposited on 2021-09-29
Acq. date: 2025-10-24
Citations
Metrics
Views
2200
since deposited on 2021-09-29
Acq. date: 2025-10-24
Citations