Publication:
Atomic layer deposition of Ru thin films using the zero-valence precursor EBECH Ru
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2012 since deposited on 2021-10-22
1last month
Acq. date: 2026-01-11
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Metrics
Views
2012 since deposited on 2021-10-22
1last month
Acq. date: 2026-01-11
Citations