Publication:

Ni- and Co-based silicides for advanced CMOS applications

Date

2003
Journal article
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Author(s)

Kittl, Jorge
;
Lauwers, Anne  
;
Chamirian, Oxana
;
Van Dal, Mark  
;
Akheyar, Amal
;
de Potter de ten Broeck, Muriel  
;
Lindsay, Richard
;
Maex, Karen  

Journal

Microelectronic Engineering

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1941 since deposited on 2021-10-15
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