Publication:

Ni- and Co-based silicides for advanced CMOS applications

Date

2003

Journal article

Simple item page Full metadata Statistics

Author(s)

;

;

Chamirian, Oxana

;

;

;

de Potter de ten Broeck, Muriel

;

Lindsay, Richard

;

Journal

Microelectronic Engineering

Statistics

1939 since deposited on 2021-10-15

Acq. date: 2026-06-06