Publication:
Strain and composition monitoring in various (Si)Ge fin structures using in-line HRXRD
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1903 since deposited on 2021-10-24
1last month
Acq. date: 2026-05-30
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Statistics
Views
1903 since deposited on 2021-10-24
1last month
Acq. date: 2026-05-30
Citations