Publication:
Strain and composition monitoring in various (Si)Ge fin structures using in-line HRXRD
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1905 since deposited on 2021-10-24
2last month
Acq. date: 2026-08-08
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Statistics
Views
1905 since deposited on 2021-10-24
2last month
Acq. date: 2026-08-08
Citations