Publication:
Strain and composition monitoring in various (Si)Ge fin structures using in-line HRXRD
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1896 since deposited on 2021-10-24
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Acq. date: 2025-10-25
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Views
1896 since deposited on 2021-10-24
438item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations