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Atomic layer deposited second-order nonlinear optical metamaterial for back-end integration with CMOS-compatible nanophotonic circuitry
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1989 since deposited on 2021-10-22
Acq. date: 2026-07-16
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Statistics
Views
1989 since deposited on 2021-10-22
Acq. date: 2026-07-16
Citations