Publication:

Effects of alloying on properties of NiSi for CMOS applications

Date

2004
Proceedings Paper
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Author(s)

Van Dal, Mark  
;
Akheyar, Amal
;
Kittl, Jorge
;
Chamirian, Oxana
;
de Potter de ten Broeck, Muriel  
;
Demeurisse, Caroline  
;
Lauwers, Anne  
;
Maex, Karen  

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2051 since deposited on 2021-10-15
Acq. date: 2025-12-08

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