Publication:

Effects of alloying on properties of NiSi for CMOS applications

Date

2004
Proceedings Paper
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dc.contributor.authorVan Dal, Mark
dc.contributor.authorAkheyar, Amal
dc.contributor.authorKittl, Jorge
dc.contributor.authorChamirian, Oxana
dc.contributor.authorde Potter de ten Broeck, Muriel
dc.contributor.authorDemeurisse, Caroline
dc.contributor.authorLauwers, Anne
dc.contributor.authorMaex, Karen
dc.contributor.imecauthorVan Dal, Mark
dc.contributor.imecauthorde Potter de ten Broeck, Muriel
dc.contributor.imecauthorDemeurisse, Caroline
dc.contributor.imecauthorLauwers, Anne
dc.contributor.imecauthorMaex, Karen
dc.date.accessioned2021-10-15T16:51:52Z
dc.date.available2021-10-15T16:51:52Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9719
dc.source.conferenceSilicon Front-End Junction Formation - Physics and technology
dc.source.conferencedate12/04/2004
dc.source.conferencelocationWarrendale, PA USA
dc.title

Effects of alloying on properties of NiSi for CMOS applications

dc.typeProceedings paper
dspace.entity.typePublication
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