Publication:
Characterisation of the local mechanical stress in sub-0.25 μm microelectronic technologies
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1949 since deposited on 2021-10-14
1last month
Acq. date: 2026-04-05
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Statistics
Views
1949 since deposited on 2021-10-14
1last month
Acq. date: 2026-04-05
Citations