Publication:
Characterisation of the local mechanical stress in sub-0.25 μm microelectronic technologies
Date
| dc.contributor.author | Stuer, Cindy | |
| dc.date.accessioned | 2021-10-14T17:55:56Z | |
| dc.date.available | 2021-10-14T17:55:56Z | |
| dc.date.issued | 2001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5690 | |
| dc.title | Characterisation of the local mechanical stress in sub-0.25 μm microelectronic technologies | |
| dc.type | PHD thesis | |
| dspace.entity.type | Publication | |
| Files | ||
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