Publication:
Formation of fluorocarbon polymer and its removal in back-end-of-line processing of advanced CMOS integrated circuits
Date
| dc.contributor.author | Le, Quoc Toan | |
| dc.contributor.author | Vereecke, Guy | |
| dc.contributor.author | Kesters, Els | |
| dc.contributor.author | Struyf, Herbert | |
| dc.contributor.author | De Gendt, Stefan | |
| dc.contributor.imecauthor | Le, Quoc Toan | |
| dc.contributor.imecauthor | Vereecke, Guy | |
| dc.contributor.imecauthor | Kesters, Els | |
| dc.contributor.imecauthor | Struyf, Herbert | |
| dc.contributor.imecauthor | De Gendt, Stefan | |
| dc.contributor.orcidimec | Le, Quoc Toan::0000-0002-0206-6279 | |
| dc.contributor.orcidimec | Vereecke, Guy::0000-0001-9058-9338 | |
| dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
| dc.date.accessioned | 2021-10-20T12:35:07Z | |
| dc.date.available | 2021-10-20T12:35:07Z | |
| dc.date.issued | 2012-11 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20993 | |
| dc.source.conference | 6th International Workshop on Advanced Materials Science and Nanotechnology - IWAMSN | |
| dc.source.conferencedate | 30/10/2012 | |
| dc.source.conferencelocation | Ha Long City Vietnam | |
| dc.title | Formation of fluorocarbon polymer and its removal in back-end-of-line processing of advanced CMOS integrated circuits | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
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