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First demonstration of vertically stacked ferroelectric Al doped HfO2 devices for NAND applications
Publication:
First demonstration of vertically stacked ferroelectric Al doped HfO2 devices for NAND applications
Date
2017
Proceedings Paper
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35547.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Florent, Karine
;
Lavizzari, Simone
;
Di Piazza, Luca
;
Popovici, Mihaela Ioana
;
Vecchio, Emma
;
Potoms, Goedele
;
Groeseneken, Guido
;
Van Houdt, Jan
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1925
since deposited on 2021-10-24
Acq. date: 2025-10-23
Citations
Metrics
Views
1925
since deposited on 2021-10-24
Acq. date: 2025-10-23
Citations