Publication:
Optimization of an advanced positive tone DUV photoresist towards 150nm and beyond
Date
| dc.contributor.author | Ercken, Monique | |
| dc.contributor.author | Moelants, Myriam | |
| dc.contributor.author | Vandenberghe, Geert | |
| dc.contributor.author | Goethals, Mieke | |
| dc.contributor.author | Ronse, Kurt | |
| dc.contributor.author | Masuda, Seiya | |
| dc.contributor.author | Spiess, Walter | |
| dc.contributor.author | Pawlowski, G. | |
| dc.contributor.imecauthor | Ercken, Monique | |
| dc.contributor.imecauthor | Moelants, Myriam | |
| dc.contributor.imecauthor | Vandenberghe, Geert | |
| dc.contributor.imecauthor | Ronse, Kurt | |
| dc.contributor.orcidimec | Ronse, Kurt::0000-0003-0803-4267 | |
| dc.date.accessioned | 2021-10-14T12:56:57Z | |
| dc.date.available | 2021-10-14T12:56:57Z | |
| dc.date.issued | 2000 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4361 | |
| dc.source.beginpage | 443 | |
| dc.source.endpage | 447 | |
| dc.source.issue | 1_4 | |
| dc.source.journal | Microelectronic Engineering | |
| dc.source.volume | 53 | |
| dc.title | Optimization of an advanced positive tone DUV photoresist towards 150nm and beyond | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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